@inproceedings{inproceedings, title = {{Simulation of oxygen vacancies at the Si-SiO2 interface}}, url = {{}}, year = {{1995}}, month = {{1}}, author = {{Carniato S and Boureau G and Harding J}}, volume = {{134}}, journal = {{RADIATION EFFECTS AND DEFECTS IN SOLIDS}}, issue = {{1-4}}, pages = {{179-183}}, note = {{Accessed on 2025/06/18}}}