TY  - JOUR

T1  - Characterization of a-SiN<inf>x</inf>:H layer: Bulk properties, interface with Si and solar cell efficiency

JO  - Physica Status Solidi (A) Applications and Materials Science

PY  - 2013/04/01

AU  - Lamers M

AU  - Butler K

AU  - Vullum PE

AU  - Harding J

AU  - Weeber A

ED  - 

DO  - DOI: 10.1002/pssa.201200532

VL  - 210

IS  - 4

SP  - 658

EP  - 668

Y2  - 2025/06/18

ER  -